Optical emission in magnetrons: Nonlinear aspects
- S.M. Rossnagel
- K.L. Saenger
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
14466 results for Physical Sciences
Aerosol dynamics in atmospheric aromatic photooxidation
- Jennifer E. Stern
- Richard C. Flagan
- et al.
- 1989
- Aerosol Science and Technology
PaperPlasma-enhanced CVD of high quality insulating films
- J. Batey
- E. Tierney
- et al.
- 1989
- Applied Surface Science
PaperFully scaled 0.5 μm MOS circuits by synchrotron radiation X-ray lithography: Devices fabrication and overlay evaluation
- J. Silverman
- V. Dimilia
- et al.
- 1989
- Microelectronic Engineering
PaperPhotoluminescence of defects introduced by deuterium plasmas in silicon
- H. Weman
- J.L. Lindström
- et al.
- 1989
- Materials Science and Engineering B
PaperTIN formed by ion beam nitriding of TiSi2
- S.E. Harnstrarn
- D. Moy
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperInterdiffusion between Si substrates and YBaCuO films
- Q.Y. Ma
- X. Wu
- et al.
- 1989
- Physica C: Superconductivity and its applications
PaperFully scaled 0.5 μm MOS cicuits by synchroton X-ray lithography: Resist systems and line width control
- David Seeger
- K.T. Kwietniak
- et al.
- 1989
- Microelectronic Engineering
PaperRoughness and porosity characterization of carbon and magnetic films through adsorption isotherm measurements
- C.L. Wang
- M.F. Toney
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperMacroscopic magnetic properties of high Tc epitaxial Y1Ba2Cu3Ox thin films
- D.C. Bullock
- T.J. Folkerts
- et al.
- 1989
- Physica C: Superconductivity and its applications
Paper