Contrast and sensitivity trade-offs of resist processing in electron beam lithography at 0.5µm and below
- W. Molzen
- Michael G. Rosenfield
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paper
Publications
14462 results for Physical Sciences
A simple metal pn polymer process using pulsed electron beams in soft vacuum
- J. Krishnaswamy
- Mark Eyolfson
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperFully scaled 0.5 micron CMOS technology using variable shaped electron beam lithography
- Philip Coane
- Paul Rudeck
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperInteraction of ultraviolet laser radiation with corneal tissue
- R. Srinivasan
- 1989
- Proceedings of SPIE 1989
Conference paper2-Cyclooctylamino-5-nitropyridine, a new nonlinear optical crystal with orthorhombic symmetry
- P. Günter
- Ch. Bosshard
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperCompact blue and green lasers based on nonlinear optical processes
- W. Lenth
- J.-C. Baumert
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperSynchrotron magnetic x-ray measurements of the order parameter in Mn0.5Zn0.5F2
- T.R. Thurston
- C. Peters
- et al.
- 1988
- Physical Review B
PaperAnomalously slow strain relaxation in quasicrystals and conventional crystals
- John Toner
- 1988
- Physical Review B
PaperTunneling measurements of the dependence of the energy gap on critical temperature in La2-xSrxCuO4-y
- A.P. Fein
- J.R. Kirtley
- et al.
- 1988
- Physical Review B
PaperPossible evidence for a first-order magnetic phase transition on the Gd(0001) surface
- D. Weller
- S.F. Alvarado
- 1988
- Physical Review B
Paper