Application of cluster tool modeling to a 300 mm fab simulation
- Sameer T. Shikalgar
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- 2003
- WSC 2003
Conference paper
Publications
25371 results for Science
High-Q Inductors on Digital VLSI CMOS Substrate for Analog RF Applications
- Frank Ellinger
- Marcel Kossel
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- 2003
- IMOC 2003
Conference paperA simulation-based tool for inventory analysis in a server computer manufacturing environment
- Heng Cao
- Feng Cheng
- et al.
- 2003
- WSC 2003
Conference paperThreshold voltage control in NiSi-gated MOSFETs through silicidation induced impurity segregation (SIIS)
- Jakub Kedzierski
- Diane Boyd
- et al.
- 2003
- IEDM 2003
Conference paperCrystallinity and wet etch behavior of HfO2 films grown by MOCVD
- Katherine L. Saenger
- Cyril Cabral Jr.
- et al.
- 2003
- MRS Proceedings 2003
Conference paperThousands of Microcantilevers for Highly Parallel and Ultra-dense Data Storage
- P. Vettiger
- T.R. Albrecht
- et al.
- 2003
- IEDM 2003
Conference paperGrowth of perovskites with crystalline interfaces on Si(100)
- G.J. Norga
- A. Guiller
- et al.
- 2003
- MRS Proceedings 2003
Conference paperA Unified Framework for Digital Halftoning and Dither Mask Construction: Variations on a Theme and Implementation Issues
- Chai Wah Wu
- Gerhard Thompson
- et al.
- 2003
- NIP 2003
Conference paperARMS: Adaptive rich media secure streaming
- Lisa Amini
- Raymond Rose
- et al.
- 2003
- MM 2003
Conference paperDevice Design Considerations for Ultra-Thin SOI MOSFETs
- B. Doris
- M. Ieong
- et al.
- 2003
- IEDM 2003
Conference paper