Advanced EUV CAR small molecule compounds design and its impact to etch performance
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- Jong Keun Park
- et al.
- 2024
- SPIE Advanced Lithography 2024
Conference paper
Publications
24897 results for Exploratory Science
Identifying trends in photoresist polymer properties to improve line and space defects Considerations to Improve Microbridge Defectivity in EUV Chemically Amplified Photoresists
- Benjamin D. Rafael-Naab
- Jong Keun Park
- et al.
- 2024
- SPIE Advanced Lithography 2024
Conference paperEtching of iridium thin films in chlorine- and fluorine-based inductively coupled plasmas
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- Hongwen Yan
- et al.
- 2024
- SPIE Advanced Lithography 2024
Conference paperDisruptive non-fluorinated photoacid generators using computational chemistry and library design
- P. Labeaume
- K. Hernandez
- et al.
- 2024
- SPIE Advanced Lithography 2024
Conference paperAcid generation efficiency prediction by bond cleavage calculation of EUV photoacid generators
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- YunJi Kim
- et al.
- 2024
- SPIE Advanced Lithography 2024
Conference paperEfficient Syndrome Decoder for Heavy Hexagonal QECC via Machine Learning
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- et al.
- 2024
- ACM TQC
PaperA Unifying Framework for Incompleteness, Inconsistency, and Uncertainty in Databases
- Benny Kimelfeld
- Phokion G. Kolaitis
- 2024
- Communications of the ACM
PaperShrinking VOD traffic via rényi-entropic optimal transport
- Chi-Jen Roger Lo
- Mahesh K. Marina
- et al.
- 2024
- Proceedings of the ACM on Measurement and Analysis of Computing Systems
PaperChemical space analysis and property prediction for carbon capture solvent molecules
- James L. McDonagh
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- 2024
- Digital Discovery
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- Sergey Bravyi
- Anirban Chowdhury
- et al.
- 2024
- PRX Quantum
Paper