XPS Studies on Emersed Silver Electrodes: Coverage and Bonding State of Specifically Adsorbed Chloride
- Wolfgang Kautek
- Joseph G. Gordon
- 2019
- JES
Paper
Publications
14465 results for Physical Sciences
A Three-Layer Resist System for Deep U.V. and RIEMicrolithography on Nonplanar Surfaces
- E. Bassous
- G. Pepper
- et al.
- 2019
- JES
PaperCurrent status of reduced temperature silicon epitaxy by chemical vapor deposition
- B.S. Meyerson
- 2019
- JES
PaperThe Use of Gas Monitors to Characterize a Low-Temperature Atmospheric-Pressure Epitaxial System
- Paul D. Agnello
- Thomas O. Sedgwick
- 2019
- JES
PaperVarious Properties of Sputter-Deposited HfB2 Films
- J.M. Eldridge
- A.R. Forouhi
- et al.
- 2019
- JES
PaperRemoval of Fluorocarbon Residues on CF4/H2 Reactive-ion-Etched Silicon Surfaces Using a Hydrogen Plasma
- J. Simko
- G.S. Oehrlein
- et al.
- 2019
- JES
PaperPhosphorus-Doped Polycrystalline Silicon via LPCVD: I. Process Characterization
- B.S. Meyerson
- W.L. Olbricht
- 2019
- JES
PaperMechanisms of Electroless Metal Plating: I. Application of the Mixed Potential Theory
- Perminder Bindra
- Judith Tweedie
- 2019
- JES
PaperThe defect mitigation on EUV stack by track based technology
- Naoki Shibata
- Lior Huli
- et al.
- 2019
- SPIE Advanced Lithography 2019
Conference paperTrack based techniques to improve high-resolution EUV patterning defectivity
- Naoki Shibata
- Lior Huli
- et al.
- 2018
- EUVL 2018
Conference paper