Publications

14465 results for Physical Sciences

Microcavity III-V lasers monolithically grown on silicon
- - Benedikt Mayer
  - Svenja Mauthe
  - et al.
- 2018
- SPIE OPTO 2018
Conference paper
Channel Geometry Impact and Narrow Sheet Effect of Stacked Nanosheet
- - Chun Wing Yeung
  - Jingyun Zhang
  - et al.
- 2018
- IEDM 2018
Conference paper
Electric field assisted placement of carbon nanotubes using sacrificial graphene electrodes
- - M. Engel
  - D.B. Farmer
  - et al.
- 2018
- TechConnect 2018
Conference paper
Monolithically integrated InGaAs microdisk lasers on silicon using template-assisted selective epitaxy
- - Svenja Mauthe
  - Benedikt Mayer
  - et al.
- 2018
- SPIE Photonics Europe 2018
Conference paper
The integration of 193i and DSA for BEOL metal cuts/blocks targeting sub-20nm tip-to-tip CD
- - Chi-Chun Liu
  - Yann Mignot
  - et al.
- 2018
- SPIE Advanced Lithography 2018
Conference paper
Coater/developer based techniques to improve high-resolution EUV patterning defectivity
- - Koichi Hontake
  - Lior Huli
  - et al.
- 2017
- SPIE Photomask Technology + EUV Lithography 2017
Conference paper
Overlay statistics for multiple exposure patterning
- - Allen H. Gabor
  - Nelson M. Felix
- 2017
- SPIE Advanced Lithography 2017
Conference paper
Air spacer for 10nm FinFET CMOS and beyond
- - K. Cheng
  - C. Park
  - et al.
- 2016
- IEDM 2016
Conference paper
CMP Challenges for Advanced Technology Nodes
- - John H Zhang
  - Haigou Huang
  - et al.
- 2017
- MRS Advances
Paper
New techniques for diffusion studies of thin polymer films
- - Ho-Ming Tong
  - K.L. Saenger
- 2016
- Journal of Plastic Film & Sheeting
Paper