Air spacer for 10nm FinFET CMOS and beyond
- K. Cheng
- C. Park
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- 2016
- IEDM 2016
Conference paper
Publications
14458 results for Physical Sciences
CMP Challenges for Advanced Technology Nodes
- John H Zhang
- Haigou Huang
- et al.
- 2017
- MRS Advances
PaperNew techniques for diffusion studies of thin polymer films
- Ho-Ming Tong
- K.L. Saenger
- 2016
- Journal of Plastic Film & Sheeting
PaperThe Study of Polyimide Film Properties and Adhesion Using a Surface Acoustic Wave Sensor
- D.W. Galipeau
- J.F. Vetelino
- et al.
- 2016
- Journal of Plastic Film & Sheeting
PaperImide-aryl Ether Phenylquinoxaline Triblock Copolymers
- J.L. Hedrick
- Jeff W. Labadie
- 2016
- High Performance Polymers
PaperThermal analysis of the crosslinking reaction in silicone rubber
- Edward M. Barrall
- Mary Ann Flandera
- 2016
- Journal of Elastomers and Plastics
PaperGraphs whose normalized Laplacian matrices are separable as density matrices in quantum mechanics
- 2016
- Discrete Mathematics
PaperHigh-Performance E-Band Transceiver Chipset for Point-to-Point Communication in SiGe BiCMOS Technology
- Run Levinger
- Roee Ben Yishay
- et al.
- 2016
- IEEE T-MTT
PaperAdvanced in-line metrology strategy for self-aligned quadruple patterning
- Robin Chao
- Mary Breton
- et al.
- 2016
- SPIE Advanced Lithography 2016
Conference paperComparison of left and right side line edge roughness in lithography
- Lei Sun
- Nicole Saulnier
- et al.
- 2016
- SPIE Advanced Lithography 2016
Conference paper