Review of Contamination Detection on Patterned Surfaces
- J. Samuel Batchelder
- 1989
- Proceedings of SPIE 1989
Conference paper
Publications
14462 results for Physical Sciences
Enhancement of RIE resistance of conventional resist materials
- H. Hiraoka
- 1989
- Proceedings of SPIE 1989
Conference paperNew Diazoketone Dissolution Inhibitors For Deep U.V. Photolithography
- Manfred Regitz
- Robert D. Miller
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperSub-halfmicron negative resist systems by image reversal
- K. Chiong
- H. Hiraoka
- 1989
- Proceedings of SPIE 1989
Conference paperPositive/negative mid uv resists with high thermal stability
- Hiroshi Ito
- Grant Willson
- 1989
- Proceedings of SPIE 1989
Conference paperDifferential geometry applied to least-square error surface approximations
- Ruud M. Bolle
- Daniel Sabbah
- 1989
- Proceedings of SPIE 1989
Conference paperPhotoconductivity in amorphous polymers: An old problem revisited
- D.M. Burland
- F.C. Bos
- 1989
- Proceedings of SPIE 1989
Conference paperTemperature effects in atomic diffusion in silicon
- Sokrates T. Pantelides
- 1987
- Physical Review B
PaperIdentification of CH resonances in the K-shell excitation spectra of gas-phase, chemisorbed, and polymeric hydrocarbons
- J. Stöhr
- D.A. Outka
- et al.
- 1987
- Physical Review B
PaperDefect dynamics and the Staebler-Wronski effect in hydrogenated amorphous silicon
- Sokrates T. Pantelides
- 1987
- Physical Review B
Paper