Reactive ion etching related Si surface residues and subsurface damage: Their relationship to fundamental etching mechanisms
- Gottiieb S. Oehrlein
- Young H. Lee
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
14465 results for Physical Sciences
Dynamics of gas-surface energy transfer: Inelastic scattering of NO from Ag(111)
- C.T. Rettner
- J. Kimman
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary Abstract: Glass and metal thin-film Interlayers for low-temperature field assisted bonding
- W.-Y. Lee
- F.O. Sequeda
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperRaman study of lattice modes in the high critical-temperature superconductor Y-Ba-Cu-O
- H. Rosen
- E.M. Engler
- et al.
- 1987
- Physical Review B
PaperSummary abstract: On the quantitative aspects of oxygen enhancement in secondary ion mass spectrometry
- Ming L. Yu
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary abstract: Anderson-Hamiltonian model of adsorbate inverse and direct photoemission and electronic excitation spectroscopies
- P. Nordiander
- Ph Avouris
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperA comparison of the interaction of CO, N2, and OC with Cu(100)
- W. Muller
- P.S. Bagus
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThermodynamic fluctuations in the superconductor Y1Ba2Cu3O9-: Evidence for three-dimensional superconductivity
- P. Freitas
- C.C. Tsuei
- et al.
- 1987
- Physical Review B
PaperSummary abstract: Local bonding and stability of the excited and ionic states of chernisorbed CO and NO
- Ph. Avouris
- P.S. Bagus
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperSummary Abstract: In situ surface and interface magnetic characterization of thin films
- Eric Kay
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper