Fabrication by tri-level electron beam lithography of X-ray masks with 50nm linewidths, and replication by X-ray nanolithography
- Erik H. Anderson
- D. Kern
- et al.
- 1987
- Microelectronic Engineering
Paper
Publications
14465 results for Physical Sciences
Evaluation of channel hot carrier effects in n-MOS transistors at 77 K with the charge pumping technique
- P. Heremans
- Y.-C. Sun
- et al.
- 1987
- Applied Surface Science
PaperObservation of bulk Landau levels in transverse magnetotunneling in AlxGa1-xAs capacitors
- T.W. Hickmott
- 1987
- Solid State Communications
PaperEffect of energetic neutralized noble gas ions on the structure of ion beam sputtered thin metal films
- E. Kay
- F. Parmigiani
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThermal donors and carbonoxygen defects in silicon
- J.L. Lindström
- H. Weman
- et al.
- 1987
- physica status solidi (a)
PaperAn analysis of equations for flow in thin, rectangular channels
- John F. O Hanlon
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperStatic properties of a particle coupled to a fermionic environment
- P. Hedegrd
- A.O. Caldeira
- 1987
- Physical Review B
PaperWide-temperature instability in high-Tc superconductors, La1.85Ba0.15CuO4
- K. Fossheim
- T. Laegreid
- et al.
- 1987
- Solid State Communications
PaperIdentification and preparation of single phase 90 K oxide superconductor and structural determination by lattice imaging
- W.J. Gallagher
- R.L. Sandstrom
- et al.
- 1987
- Solid State Communications
PaperThermal oxidation of silicon: New experimental results and models
- Eugene A. Irene
- R. Ghez
- 1987
- Applied Surface Science
Paper