Publications

3553 results for Materials Discovery

Deposition of Metal Overlayers at End-Group-Functionalized Thiolate Monolayers Adsorbed at Au. 1. Surface and Interfacial Chemical Characterization of Deposited Cu Overlayers at Carboxylic Acid-Terminated Structures
- - Earl L. Smith
  - Carla A. Alves
  - et al.
- 2002
- Langmuir
Paper
Molecular monolayers and films
- - J.D. Swalen
  - D.L. Allara
  - et al.
- 2002
- Langmuir
Review
Characterization and monitoring of silicon-on-insulator fabrication processes by high-resolution x-ray diffraction
- - G.M. Cohen
  - P.M. Mooney
  - et al.
- 2002
- MRS Proceedings 2002
Conference paper
Silicon self-interstitial cluster formation and dissolution in SOI
- - A.F. Saavedra
  - J. Frazer
  - et al.
- 2002
- MRS Proceedings 2002
Conference paper
Characteristics of low-k and ultralow-k PECVD deposited SiCOH films
- - A. Grill
  - V.V. Patel
  - et al.
- 2002
- MRS Proceedings 2002
Conference paper
A self-aligned silicide process utilizing ion implants for reduced silicon consumption and control of the silicide formation temperature
- - G.M. Cohen
  - C. Cabral Jr.
  - et al.
- 2002
- MRS Proceedings 2002
Conference paper
The growth of tantalum thin films by plasma-enhanced atomic layer deposition and diffusion barrier properties
- - H. Kim
  - C. Cabral Jr.
  - et al.
- 2002
- MRS Proceedings 2002
Conference paper
Low temperature metal organic chemical vapor deposition of aluminum oxide thin films for advanced CMOS gate dielectric applications
- - Spyridon Skordas
  - Filippos Papadatos
  - et al.
- 2002
- MRS Proceedings 2002
Conference paper
Crystallographic texture and phase metrology during damascene copper processing
- - K.J. Kozaczek
  - P. DeHaven
  - et al.
- 2002
- MRS Proceedings 2002
Conference paper
Texture and resistivity of Cu and dilute Cu alloy films
- - K. Barmak
  - A. Gungor
  - et al.
- 2002
- MRS Proceedings 2002
Conference paper