Cu and dilute binary Cu(Ti), Cu(Sn) and Cu(Al) thin films: Texture, grain growth and resistivity
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Conference paper
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3555 results for Materials Discovery
Crystallographic texture and phase metrology during damascene copper processing
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- 2002
- MRS Proceedings 2002
Conference paperTexture and resistivity of Cu and dilute Cu alloy films
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- 2002
- MRS Proceedings 2002
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- MRS Proceedings 2002
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- MRS Proceedings 2002
Conference paperDynamic AFM using the FM technique with constant excitation amplitude
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- 2002
- Applied Surface Science
Conference paper8 Gb/s CMOS compatible monolithically integrated silicon optical receiver
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Conference paperKinetic effects in heteroepitaxial growth
- 2002
- Applied Surface Science
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