Ion energy and anisotropy in microwave plasma etching of polymers
- J. Heidenreich
- J. Paraszczak
- et al.
- 1986
- Microelectronic Engineering
Paper
Publications
14462 results for Physical Sciences
Raman spectra of molecules considered to be surface enhanced
- H. Seki
- 1986
- Journal of Electron Spectroscopy and Related Phenomena
PaperSummary Abstract: Diagnostics in plasma processing
- J.W. Coburn
- 1986
- JVSTA
PaperElectrical and thermal stability of AuGeNi ohmic contacts to GaAs fabricated with in situ RF sputter cleaning
- A.C. Callegari
- D. Lacey
- et al.
- 1986
- Solid-State Electronics
PaperTopotactic transitions of the tetramer of P‐acetoxybenzoic acid
- W. Volksen
- R.H. Geiss
- et al.
- 1986
- Journal of Polymer Science, Part B: Polymer Physics
PaperInvestigations of the band line-up in semimetallic InAsGaSb superlattices under hydrostatic pressure
- L.M. Claessen
- J.C. Maan
- et al.
- 1986
- Superlattices and Microstructures
PaperResonant tunneling properties of heterostructures
- Peter J. Price
- 1986
- Superlattices and Microstructures
PaperDiazopolysiloxanes: Unique imageable barrier layers
- E. Babich
- J.M. Shaw
- et al.
- 1986
- Microelectronic Engineering
PaperNew models for the structure of the electrochemical interface
- Wolfgang Schmickler
- Douglas Henderson
- 1986
- Progress in Surface Science
ReviewPACKINGS OF UNIFORM DISKS HAVING BOND ORIENTATIONAL ORDER.
- George Y. Onoda
- 1985
- MRS Symposium 1985
Conference paper