Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing
- H. Kim
- 2003
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
26903 results for Science
On the Use of Conceptual Reconstruction for Mining Massively Incomplete Data Sets
- Srinivasan Parthasarathy
- Charu C. Aggarwal
- 2003
- IEEE Transactions on Knowledge and Data Engineering
PaperBoosting and combination of classifiers for natural language call routing systems
- Imed Zitouni
- Hong-Kwang Jeff Kuo
- et al.
- 2003
- Speech Communication
PaperA secure conference scheme for mobile communications
- Xun Yi
- Chee Kheong Siew
- et al.
- 2003
- IEEE TWC
PaperClustering intrusion detection alarms to support root cause analysis
- Klaus Julisch
- 2003
- ACM TISSEC
ReviewNear edge x-ray absorption fine structure measurements of surface segregation in 157 nm photoresist blends
- Erin L. Jablonski
- Vivek M. Prabhu
- et al.
- 2003
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paperTowards implementation of a nickel silicide process for CMOS technologies
- C. Lavoie
- F.M. D'Heurle
- et al.
- 2003
- Microelectronic Engineering
Conference paperReduced Cu interface diffusion by CoWP surface coating
- C.-K. Hu
- L. Gignac
- et al.
- 2003
- Microelectronic Engineering
Conference paperCorrelation of electromigration lifetime distribution to failure mode in dual Damascene Cu/SiLK interconnects
- L. Gignac
- C.-K. Hu
- et al.
- 2003
- Microelectronic Engineering
Conference paperElectronic collective modes and superconductivity in layered conductors
- A. Bill
- H. Morawitz
- et al.
- 2003
- Physical Review B - CMMP
Paper