Thermal stability of strained Si on relaxed Si1-xGex buffer layers
- P.M. Mooney
- S.J. Koester
- et al.
- 2001
- MRS Proceedings 2001
Conference paper
Publications
3555 results for Materials Discovery
A patterned SOI by masked anneal for system-on-chip applications
- G.M. Cohen
- D.K. Sadana
- 2001
- MRS Proceedings 2001
Conference paperStrain relaxation mechanisms in He+-implanted and annealed Si1-xGex layers on Si(001) substrates
- S. Christiansen
- P.M. Mooney
- et al.
- 2001
- MRS Proceedings 2001
Conference paperFormation of mixed layers derived from functional silicon oxide clusters on gold
- Kenneth T. Nicholson
- Kangzhan Zhang
- et al.
- 2001
- Langmuir
PaperThe use of in situ X-ray diffraction, optical scattering and resistance analysis techniques for evaluation of copper diffusion barriers in blanket films and damascene structures
- C. Cabral Jr.
- C. Lavoie
- et al.
- 2001
- Thin Solid Films
PaperSelf-limiting chemical vapor deposition of an ultra-thin silicon oxide film using tri-(tert-butoxy)silanol
- K.A. Miller
- C. John
- et al.
- 2001
- Thin Solid Films
PaperFrom tribological coatings to low-k dielectrics for ULSI interconnects
- A. Grill
- 2001
- Thin Solid Films
Conference paperComparison of energetic carbon deposition processes for use as ultra-thin disk overcoats
- Richard L. White
- Bing K. Yen
- et al.
- 2001
- TRIB 2001
Conference paperHead-disk interface issues for near contact recording
- R.H. Wang
- V. Raman
- et al.
- 2001
- TRIB 2001
Conference paperRecent developments in micro and nanoscale thermometry
- Li Shi
- Arun Majumdar
- 2001
- Microscale Thermophysical Engineering
Review