Publications

3613 results for Mathematical Sciences

Modeling polarization for Hyper-NA lithography tools and masks
- - Kafai Lai
  - Alan E. Rosenbluth
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paper
Global optimization of masks, including film stack design to restore TM contrast in high NA TCC's
- - Alan E. Rosenbluth
  - David Melville
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paper
The effect of photoresist/topcoat properties on defect formation in immersion lithography
- - G.M. Wallraff
  - Carl E. Larson
  - et al.
- 2007
- Proceedings of SPIE 2007
Conference paper
Building an immersion top coat from the ground up - Materials perspective
- - Mahmoud Khojasteh
  - Irene Popova
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paper
OPC model data collection for 45nm technology node using automatic CD-SEM offline recipe creation
- - Daniel Fischer
  - Mohamed Talbi
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paper
Self-aligned, self-assembled organosilicate line patterns of ∼20nm half-pitch from block copolymer mediated self-assembly
- - Ho-Cheol Kim
  - Joy Cheng
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paper
Fluoroalcohol materials with tailored interfacial properties for immersion lithography
- - Daniel P. Sanders
  - Linda K. Sundberg
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paper
Contact angles & structure/surface property relationships of immersion materials 65191Q
- - Linda K. Sundberg
  - Daniel P. Sanders
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Conference paper
Use of starburst patterns in optical lithography
- - M. Burkhardt
  - Cyrus Tabery
- 2007
- SPIE Advanced Lithography 2007
Conference paper
Future directions for CMOS device technology development from a system application perspective
- - Tak H. Ning
- 2007
- SPIE Advanced Lithography 2007
Conference paper