Setting MRC rules: Balancing inspection capabilities, defect sensitivity and OPC
- Ian Stobert
- James Bruce
- et al.
- 2007
- SPIE Advanced Lithography 2007
Publications
3599 results for Mathematical Sciences
High performance 193nm photoresists based on fluorosulfonamide
- Wenjie Li
- Kuang-Jung Chen
- et al.
- 2007
- SPIE Advanced Lithography 2007
Improving the power-performance of multicore processors through optimization of lithography and thermal processing
- A. Gabor
- T.A. Brunner
- et al.
- 2007
- SPIE Advanced Lithography 2007
Fluoroalcohol materials with tailored interfacial properties for immersion lithography
- Daniel P. Sanders
- Linda K. Sundberg
- et al.
- 2007
- SPIE Advanced Lithography 2007
Use of starburst patterns in optical lithography
- M. Burkhardt
- Cyrus Tabery
- 2007
- SPIE Advanced Lithography 2007
Inapproximability results for combinatorial auctions with submodular utility functions
- Subhash Khot
- Richard J. Lipton
- et al.
- 2007
- Algorithmica (New York)
A note on Banach Principle for JW-algebras
- Genady Ya. Grabarnik
- Alexander A. Katz
- 2007
- WSEAS Transactions on Mathematics
Slepian-wolf coding for general sources and its duality with channel coding
- Jun Chen
- Da-Ke He
- et al.
- 2007
- CWIT 2007
On optimum conventional quantization for source coding with side information at the decoder
- Lin Zheng
- Da-Ke He
- et al.
- 2007
- CWIT 2007
An algebraic characterization of the halting probability
- Gregory Chaitin
- 2007
- Fundamenta Informaticae