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- 2003
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- J. Beintner
- Y. Li
- et al.
- 2003
- VLSI-TSA 2003
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- 2003
- VLSI-TSA 2003
Conference paperSuper-halo asymmetric vertical pass transistor design for ultra-dense DRAM technologies
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- K. McStay
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- 2003
- VLSI-TSA 2003
Conference paperHigh Resolution Material Processing with Femtosecond Lasers: Mask Repair and Beyond
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- Alfred Wagner
- et al.
- 2003
- FiO 2003
Conference paperMicrostructure and properties of ultrathin amorphous silicon nitride protective coating
- Bing K. Yen
- Richard L. White
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- 2003
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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- Chuck Black
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- 2003
- Microlithography 2003
Conference paperPolymer dynamics and diffusive properties in ultra-thin photoresist films
- Christopher L. Soles
- Ronald L. Jones
- et al.
- 2003
- Microlithography 2003
Conference paperHybrid TDMA/CDMA based on filtered multitone modulation for uplink transmission in HFC networks
- Giovanni Cherubini
- 2003
- IEEE Communications Magazine
PaperDynamic force spectroscopy using the frequency modulation technique with constant excitation
- H. Hölscher
- B. Gotsmann
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- 2003
- Physical Review B - CMMP
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