Contrast enhanced UV lithography with polysilanes
- Donald C. Hofer
- Robert D. Miller
- et al.
- 1984
- Microlithography 1984
Conference paper
Publications
14462 results for Physical Sciences
Polysilane Bilayer UV Lithography
- Donald C. Hofer
- Robert D. Miller
- et al.
- 1989
- Proceedings of SPIE 1989
Conference paperHigh resolution polymer pattern fabrications with Low energy proton beams
- H. Hiraoka
- 1984
- Microlithography 1984
Conference paperEffect of developer composition on photoresist performance
- William D. Hinsberg
- Monica L. Gutierrez
- 1989
- Proceedings of SPIE 1989
Conference paperElectronic states of oxygen in gallium phosphide
- T.N. Morgan
- 1984
- Physical Review B
PaperParallel and perpendicular multilayer relaxation of Fe{310}
- J. Sokolov
- F. Jona
- et al.
- 1984
- Physical Review B
PaperMolecular-dynamics studies of grain-boundary diffusion. I. Structural properties and mobility of point defects
- Thomas Kwok
- Paul S. Ho
- et al.
- 1984
- Physical Review B
PaperLong-range structural and electronic coherence in amorphous semiconductors
- D.P. DiVincenzo
- R. Mosseri
- et al.
- 1984
- Physical Review B
PaperMolecular-dynamics studies of grain-boundary diffusion. II. Vacancy migration, diffusion mechanism, and kinetics
- Thomas Kwok
- Paul S. Ho
- et al.
- 1984
- Physical Review B
PaperPhotoemission study of WC(0001)
- P.M. Stefan
- M.L. Shek
- et al.
- 1984
- Physical Review B
Paper