Microcolumn based low energy e-beam writing
- C. Stebler
- M. Despont
- et al.
- 1996
- Microelectronic Engineering
Paper
Publications
221 results at Microelectronic Engineering
The nanoworld: Chances and challenges
- Heinrich Rohrer
- 1996
- Microelectronic Engineering
PaperAtomic-scale analysis of quantum nanostructures with the STM
- M. Johnson
- M. Pfister
- et al.
- 1995
- Microelectronic Engineering
PaperAnomalous positive charge formation by atomic hydrogen exposure
- R.E. Stahlbush
- E. Cartier
- et al.
- 1995
- Microelectronic Engineering
PaperA new mask lithography tool for advanced mask manufacturing
- B.J. Grenon
- H.C. Hamaker
- et al.
- 1995
- Microelectronic Engineering
PaperDissociation kinetics of hydrogen-passivated (100) Si SiO2 interface defects
- 1995
- Microelectronic Engineering
PaperMicrofabrication of lenses of a miniaturized electron column
- M. Despont
- U. Staufer
- et al.
- 1995
- Microelectronic Engineering
PaperDetermination of Helium presence in the mask/wafer gap of X-ray lithography steppers
- Juan R. Maldonado
- Ron DellaGuardia
- et al.
- 1995
- Microelectronic Engineering
PaperThe nanometer age: Challenge and chance
- H. Rohrer
- 1995
- Microelectronic Engineering
PaperMicromechanical structures for data storage
- T.C. Reiley
- L.-S. Fan
- et al.
- 1995
- Microelectronic Engineering
Paper