Evaluation of molybdenum silicide for use as a 193 nm phase-shifting absorber in photomask manufacturing
- M. Hibbs
- M. Ushida
- et al.
- 2001
- Proceedings of SPIE- The International Society for Optical Engineering
Paper
Publications
24912 results for Exploratory Science
An algorithm for efficient segmentation and selection of representative frames in video sequences
- Konstantin Y. Kupeev
- Zohar Sivan
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperBusiness-to-business integration with tpaML and a business-to-business protocol framework
- A. Dan
- Daniel M. Dias
- et al.
- 2001
- IBM Systems Journal
PaperBiquadratic exchange coupling in an unequal Fe/Cr/Fe(1 0 0) trilayer
- P. Vavassori
- M. Grimsditch
- et al.
- 2001
- Journal of Magnetism and Magnetic Materials
PaperExtending the performance of KRS-XE for high throughput electron beam lithography for advanced mask making
- David R. Medeiros
- Karen E. Petrillo
- et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
PaperBurstein-Moss shift of n-doped In0.53Ga0.47As/inp
- Martín Muñoz
- Fred H. Pollak
- et al.
- 2001
- Physical Review B - CMMP
PaperPseudospectra analysis, nonlinear eigenvalue problems, and studying linear systems with delays
- J. Cullum
- A.E. Ruehli
- 2001
- BIT Numerical Mathematics
PaperChemical and physical aspects of the post-exposure baking process used for positive-tone chemically amplified resists
- W.D. Hinsberg
- F.A. Houle
- et al.
- 2001
- IBM J. Res. Dev
PaperNoise performance and considerations for integrated RF/analog/mixed-signal design in a high-performance SiGe BiCMOS technology
- D.R. Greenberg
- S. Sweeney
- et al.
- 2001
- Technical Digest - International Electron Devices Meeting
PaperPreisach analysis of epitaxial hard/soft bilayers
- D.R. Cornejo
- F.M. Rhen
- et al.
- 2001
- Journal of Magnetism and Magnetic Materials
Paper