Estimating pattern sensitivity to the printing process for varying dose/focus conditions for RET development in the sub-22nm era
- Benoit Seguin
- Henri Saab
- et al.
- 2014
- SPIE Advanced Lithography 2014
Publications
14446 results for Physical Sciences
Leveraging data analytics, patterning simulations and metrology models to enhance CD metrology accuracy for advanced IC nodes
- Narender Rana
- Yunlin Zhang
- et al.
- 2014
- SPIE Advanced Lithography 2014
Molecular glass resists for scanning probe lithography
- Christian Neuber
- Andreas Ringk
- et al.
- 2014
- SPIE Advanced Lithography 2014
Clear sub-resolution assist features for EUV
- Martin Burkhardt
- Greg McIntyre
- et al.
- 2014
- SPIE Advanced Lithography 2014
Strain scaling for CMOS
- Stephen W. Bedell
- Ali Khakifirooz
- et al.
- 2014
- MRS Bulletin
Dissecting the contributions of β-hairpin tyrosine pairs to the folding and stability of long-lived human γd-crystallins
- Zaixing Yang
- Zhen Xia
- et al.
- 2014
- Nanoscale
Magnetism in single metalloorganic complexes formed by atom manipulation
- Taeyoung Choi
- M. Badal
- et al.
- 2014
- Nano Letters
Inelastic light-scattering from spin-density excitations in the regime of the persistent spin helix in a GaAs-AlGaAs quantum well
- C. Schönhuber
- M.P. Walser
- et al.
- 2014
- Physical Review B - CMMP
High-speed low-power short-reach optical interconnects for high-performance computing and servers
- Daniel M. Kuchta
- 2014
- SPIE OPTO 2014
Frictional dissipation in a polymer bilayer system
- Lars Jansen
- Mark A. Lantz
- et al.
- 2014
- Langmuir