Resist requirements and limitations for nanoscale electron-beam patterning
- J. Alexander Liddle
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- 2002
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Conference paper
Publications
26909 results for Science
RVision: An open and high configurable tool for cluster monitoring
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- 2002
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Conference paperSub-30 nm P+ abrupt junction formation in strained Si/Si1-xGex MOS device
- K.L. Lee
- J.O. Chu
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- 2002
- IEDM 2002
Conference paperNoise performance of a low base resistance 200 GHz SiGe technology
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- B. Jagannathan
- et al.
- 2002
- IEDM 2002
Conference paperThe social contract core
- James H. Kaufman
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- 2002
- WWW 2002
Conference paperAn example of how an unconventional order parameter symmetry may open new perspectives in the design of HTS Josephson junctions
- F. Tafuri
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- 2002
- SPIE Optical Science and Technology 2002
Conference paperCarbon nanotube electronics
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- Joachim Knoch
- et al.
- 2002
- IEEE TNANO
Conference paperCharge trapping in high K gate dielectric stacks
- Sufi Zafar
- Alessandro Callegari
- et al.
- 2002
- IEDM 2002
Conference paperMetal-gate FinFET and fully-depleted SOI devices using total gate silicidation
- Jakub Kedzierski
- Edward Nowak
- et al.
- 2002
- IEDM 2002
Conference paperBallistic FET modeling using QDAME: Quantum device analysis by modal evaluation
- Steven E. Laux
- Arvind Kumar
- et al.
- 2002
- IEEE TNANO
Conference paper