Resist requirements and limitations for nanoscale electron-beam patterning
- J. Alexander Liddle
- Gregg M. Gallatin
- et al.
- 2002
- MRS Proceedings 2002
Conference paper
Publications
26926 results for Science
A functional FinFET-DGCMOS SRAM cell
- E. Nowak
- B. Rainey
- et al.
- 2002
- IEDM 2002
Conference paperA high performance 90 nm SOI technology with 0.992 μm2 6T-SRAM cell
- Mukesh Khare
- S. Ku
- et al.
- 2002
- IEDM 2002
Conference paperLow field mobility characteristics of sub-100 nm unstrained and strained Si MOSFETs
- K. Rim
- S. Narasimha
- et al.
- 2002
- IEDM 2002
Conference paperIon projection direct-structuring for nanotechnology applications
- Hans Loeschner
- Ernest J. Fantner
- et al.
- 2002
- MRS Proceedings 2002
Conference paperExamination of hole mobility in ultra-thin body SOI MOSFETs
- Zhibin Ren
- Paul M. Solomon
- et al.
- 2002
- IEDM 2002
Conference paperModeling of quantum effects for ultrathin oxide MOS structures with an effective potential
- Yiming Li
- Ting-Wei Tang
- et al.
- 2002
- IEEE TNANO
Conference paperLaw-governed peer-to-peer auctions
- Marcus Fontoura
- Mihail Ionescu
- et al.
- 2002
- WWW 2002
Conference paperPower-constrained device and technology design for the end of scaling
- David J. Frank
- 2002
- IEDM 2002
Conference paperCarbon nanotube electronics
- Phaedon Avouris
- Joerg Appenzeller
- et al.
- 2002
- IEDM 2002
Conference paper