Closed-loop high-speed 3D thermal probe nanolithography
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- Michal Zientek
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paper
Publications
9268 results for Computer Science
Short-term forecasting of cloud images using local features
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- Fei Su
- et al.
- 2013
- ICGIP 2013
Conference paperTowards electrical testable soi devices using directed self-assembly for fin formation
- Chi Chun Liu
- Cristina Estrada-Raygoza
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperClear sub-resolution assist features for EUV
- Martin Burkhardt
- Greg McIntyre
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperEstimating pattern sensitivity to the printing process for varying dose/focus conditions for RET development in the sub-22nm era
- Benoit Seguin
- Henri Saab
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperICE: Ionic contrast enhancement for organic solvent negative tone develop
- Linda K. Sundberg
- Gregory M. Wallraff
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperCDSEM AFM hybrid metrology for the characterization of gate-all-around silicon nano wires
- Shimon Levi
- Ishai Schwarzband
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperPrecise CD-SEM metrology of resist patterns at around 20 nm for 0.33NA EUV lithography
- Nobuhiro Okai
- Erin Lavigne
- et al.
- 2014
- SPIE Advanced Lithography 2014
Conference paperMathematical programming: Turing completeness and applications to software analysis
- Leo Liberti
- Fabrizio Marinelli
- 2014
- J Combin Optim
PaperGLB: Lifeline-based global load balancing in X10
- Wei Zhang
- Olivier Tardieu
- et al.
- 2014
- PPoPP 2014
Workshop paper