Crystallographic texture and phase metrology during damascene copper processing
- K.J. Kozaczek
- P. DeHaven
- et al.
- 2002
- MRS Proceedings 2002
Conference paper
Publications
26911 results for Science
Pyrene fluorescence as a molecular probe of miscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications
- Q.R. Huang
- David Mecerreyes
- et al.
- 2002
- MRS Proceedings 2002
Conference paperTexture and resistivity of Cu and dilute Cu alloy films
- K. Barmak
- A. Gungor
- et al.
- 2002
- MRS Proceedings 2002
Conference paperThe stability of triangular 'droplet' phases on Si(1 1 1)
- J.B. Hannon
- J. Tersoff
- et al.
- 2002
- Journal of Crystal Growth
Conference paperEvaluation of the chemical-mechanical planarization (CMP) performance of silicon nitride and silicon carbide as hard mask materials for Cu-based interconnect technology
- Wei-Tsu Tseng
- Jia Lee
- et al.
- 2002
- MRS Spring Meeting 2002
Conference paperTerabit density cobalt nanowire arrays with tunable magnetic properties
- Andrei Ursache
- Mustafa Bal
- et al.
- 2002
- MRS Proceedings 2002
Conference paperThe growth of tantalum thin films by plasma-enhanced atomic layer deposition and diffusion barrier properties
- H. Kim
- C. Cabral Jr.
- et al.
- 2002
- MRS Proceedings 2002
Conference paperA self-aligned silicide process utilizing ion implants for reduced silicon consumption and control of the silicide formation temperature
- G.M. Cohen
- C. Cabral Jr.
- et al.
- 2002
- MRS Proceedings 2002
Conference paperObjects, XML and databases
- Akmal B. Chaudhri
- 2002
- Information and Software Technology
Conference paperMicromagnetic behavior of electrodeposited cylinder arrays
- C.A. Ross
- M. Hwang
- et al.
- 2002
- Physical Review B - CMMP
Paper