Selection of attenuated phase shift mask compatible contact hole resists for KrF optical lithography
- Zhijian G. Lu
- Yuping Cui
- et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999
Conference paper
Publications
24866 results for Exploratory Science
Molecular weight tailoring in methacrylate 193 nm photoresists
- Thomas I. Wallow
- P.J. Brock
- et al.
- 1999
- SPIE Advances in Resist Technology and Processing 1999
Conference paperReduction of intrinsic stress in cubic boron nitride films
- J. Ullmann
- A.J. Kellock
- et al.
- 1999
- Thin Solid Films
Paper5×5 2D AFM cantilever arrays a first step towards a Terabit storage device
- M.I. Lutwyche
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
PaperCombined Effects Due to Phase, Intensity, and Contrast in Electrooptic Modulation: Application to Ferroelectric Materials
- Laurent Guilbert
- Jean Paul Salvestrini
- et al.
- 1999
- IEEE JQE
PaperUse of the Gibbs sampler to invert large, possibly sparse, positive definite matrices
- David A. Harville
- 1999
- Linear Algebra and Its Applications
PaperElectron-yield saturation effects in l-edge x-ray magnetic circular dichroism spectra of fe, co, and ni
- Reiko Nakajima
- J. Stöhr
- et al.
- 1999
- Physical Review B - CMMP
PaperOrganic-inorganic multilayer structures: A novel route to highly efficient organic light-emitting diodes
- Walter Rieß
- Heike Riel
- et al.
- 1999
- Synthetic Metals
PaperAssessing the registration of CT-scan data to intra-operative X-rays by fusing X-rays and preoperative information
- A. Gueziec
- 1999
- Proceedings of SPIE - The International Society for Optical Engineering
Conference paper3D visualization of the scoliotic spine: longitudinal studies, data acquisition, and radiation dosage constraints
- A.D. Kalvin
- R. Adler
- et al.
- 1999
- SPIE Medical Imaging 1999
Conference paper