Projection reduction exposure with variable axis immersion lenses: Next generation lithography
- H.C. Pfeiffer
- R.S. Dhaliwal
- et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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Publications
24866 results for Exploratory Science
Critical examination of the fundamental relations used in the analysis of nanoindentation data
- Jack C. Hay
- A. Bolshakov
- et al.
- 1999
- Journal of Materials Research
PaperCurrent-driven vortex dynamics in untwinned YBa2Cu3O7 superconducting single crystals
- W. Jiang
- N.C. Yeh
- et al.
- 1999
- Journal of Physics Condensed Matter
Paper(Ba,Sr)TiO3 dielectrics for future stacked-capacitor DRAM
- D.E. Kotecki
- J.D. Baniecki
- et al.
- 1999
- IBM J. Res. Dev
PaperNon-uniform composition profiles in thin film polymeric nanofoams
- J.S. Fodor
- R.M. Briber
- et al.
- 1999
- Polymer
PaperUltrathin nitrided gate dielectrics by plasma-assisted processing
- E. Gusev
- D.A. Buchanan
- et al.
- 1999
- Microelectronic Engineering
PaperInformation is a physical entity
- Rolf Landauer
- 1999
- Physica A: Statistical Mechanics and its Applications
PaperImplementation of a high speed multiport register file in a 1.8V, 0.25 μm CMOS bulk and SOI technology
- R.V. Joshi
- W. Hwang
- et al.
- 1999
- International Symposium on VLSI Technology, Systems, and Applications, Proceedings
PaperApplication of the non-adiabatic phase matrix method to vibrational excitation near a short-lived resonance: The case of e-H2 scattering
- S. Mazevet
- Michael A. Morrison
- et al.
- 1999
- Journal of Physics B
PaperMicrostructural characterization of carbon films and CNx films produced by N+ implantation
- N. Laidani
- A. Miotello
- et al.
- 1999
- Journal of Physics Condensed Matter
Paper