The use of in situ X-ray diffraction, optical scattering and resistance analysis techniques for evaluation of copper diffusion barriers in blanket films and damascene structures
- C. Cabral Jr.
- C. Lavoie
- et al.
- 2001
- Thin Solid Films
Paper
Publications
26931 results for Science
Submicrometer Platinum Electrodes by Through-Mask Plating
- K.L. Saenger
- G. Costrini
- et al.
- 2001
- JES
PaperPREVAIL-EPL alpha tool: Early results
- S.D. Golladay
- H.C. Pfeiffer
- et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperAnalysis of power/ground-plane EMI decoupling performance using the partial-element equivalent circuit technique
- Bruce Archambeault
- Albert E. Ruehli
- 2001
- IEEE Trans Electromagn Compat
PaperThrashing control and avoidance for concurrent mergesorts using parallel prefetching
- Kun-Lung Wu
- Philip S. Yu
- et al.
- 2001
- CSSE
PaperFrequency-dependent losses on high-performance interconnections
- Alina Deutsch
- Gerard V. Kopcsay
- et al.
- 2001
- IEEE Trans Electromagn Compat
PaperMining associations with the collective strength approach
- Charu C. Aggarwal
- Philip S. Yu
- 2001
- IEEE Transactions on Knowledge and Data Engineering
PaperSelf-limiting chemical vapor deposition of an ultra-thin silicon oxide film using tri-(tert-butoxy)silanol
- K.A. Miller
- C. John
- et al.
- 2001
- Thin Solid Films
PaperNear-complete spin polarization in atomically-smooth chromium-dioxide epitaxial films prepared using a CVD liquid precursor
- A. Anguelouch
- A. Gupta
- et al.
- 2001
- Physical Review B - CMMP
PaperDynamical study of remanent magnetization in nanoparticles
- G. Grinstein
- G.A. Held
- et al.
- 2001
- Journal of Magnetism and Magnetic Materials
Paper