Effects of underlayer on performance of bilayer resists for 248-nm lithography
- Katherina Babich
- Alessandro Callegari
- et al.
- 1998
- Microlithography 1998
Conference paper
Publications
24867 results for Exploratory Science
S-STIR: Similarity search through iterative refinement
- Chung-Sheng Li
- John R. Smith
- et al.
- 1998
- IS&T/SPIE Electronic Imaging 1998
Conference paperApplying statistical process control to the adaptive rate control problem
- Nelson R. Manohar
- Marc Willebeek-LeMair
- et al.
- 1998
- SPIE Photonics West 1998
Conference paperPerformance test case generation for microprocessors
- Pradip Bose
- 1998
- VTS 1998
Conference paperInjection, transport and recombination in organic light-emitting diodes
- J.C. Scott
- George G. Malliaras
- et al.
- 1998
- SPIE Optical Science, Engineering, and Instrumentation 1998
Conference paperInformation fusion by combining multiple features and classifiers
- J. Mao
- 1998
- ISMIP 1998
Conference paperExperimental investigations of the Sneddon solution and an improved solution for the analysis of nanoindentation data
- J.C. Hay
- G.M. Pharr
- 1998
- MRS Spring Meeting 1998
Conference paperOptical lens specifications from the user's perspective
- Christopher J. Progler
- Donald C. Wheeler
- 1998
- SPIE Advanced Lithography 1998
Conference paperTiming analysis and optimization: From devices to systems
- A. Devgan
- Sandip Kundu
- 1998
- ASP-DAC 1998
Conference paperOn locally invertible 2-D polynomial convolutional encoders
- A. Dholakia
- H. Koorapaty
- 1998
- ISIT 1998
Conference paper