Characterization of silicon surface preparation processes for advanced gate dielectrics
- H. Okorn-Schmidt
- 1999
- IBM J. Res. Dev
Paper
Publications
25372 results for Science
Existence of stationary vacuum solutions of Einstein's equations in an exterior domain
- Jürgen Klenk
- 1999
- Journal of the Australian Mathematical Society Series B-Applied Mathematics
PaperDonor-related levels in GaAs and AlxGa1-xAs
- P.M. Mooney
- 1999
- Semiconductor Science and Technology
PaperProjection reduction exposure with variable axis immersion lenses: Next generation lithography
- H.C. Pfeiffer
- R.S. Dhaliwal
- et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper(Ba,Sr)TiO3 dielectrics for future stacked-capacitor DRAM
- D.E. Kotecki
- J.D. Baniecki
- et al.
- 1999
- IBM J. Res. Dev
PaperOxide scaling limit for future logic and memory technology
- J.H. Stathis
- D.J. DiMaria
- 1999
- Microelectronic Engineering
PaperEffect of inhomogeneities on dynamic crack growth in an elastic solid
- X.-P. Xu
- A. Needleman
- et al.
- 1999
- Modelling and Simulation in Materials Science and Engineering
PaperFactors controlling pattern formation in chemically amplified resists at sub-100 nm dimensions
- W.D. Hinsberg
- F.A. Houle
- et al.
- 1999
- J. Photopolym. Sci. Tech.
Paper2 + p-SAT: Relation of typical-case complexity to the nature of the phase transition
- Rémi Monasson
- Riccardo Zecchina
- et al.
- 1999
- Random Structures and Algorithms
PaperConversion of bulk CMOS circuits to SOI technology and its noise impact
- L.K. Wang
- Howard H. Chen
- 1999
- International Symposium on VLSI Technology, Systems, and Applications, Proceedings
Paper