Chemically amplified resist processing with top coats for deep-ultraviolet and e-beam applications
- Karen Petrillo
- James Bucchignano
- et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
24910 results for Exploratory Science
Parametric kinematic tolerance analysis of general planar systems
- Elisha Sacks
- Leo Joskowicz
- 1998
- CAD Computer Aided Design
PaperColorfast blue-light-emitting random copolymers derived from Di-n-hexylfluorene and anthracene
- Gerrit Klärner
- Mark H. Davey
- et al.
- 1998
- Advanced Materials
PaperLocal-mode analysis of continuous transitions in rectangular waveguides
- S. Fondacci
- M. Mongiardo
- et al.
- 1998
- International Journal of RF and Microwave Computer-Aided Engineering
PaperThe java factor
- Sandeep Singhal
- Binh Nguyen
- 1998
- Communications of the ACM
PaperEfficient Self-embedding Of Butterfly Networks With Random Faults
- Hisao Tamaki
- 1998
- SIAM Journal on Computing
PaperTiger shark - A scalable file system for multimedia
- Roger Haskin
- 1998
- IBM J. Res. Dev
PaperInterface state capture cross section measurements on vacuum annealed and radiation damaged Si:SiO2 surfaces
- M.J. Uren
- V. Nayar
- et al.
- 1998
- JES
PaperThe performance impact of exploiting branch ILP with tree representation of ILP code
- Soo-Mook Moon
- Kemal Ebcioǧlu
- 1998
- Computer Journal
PaperChallenges and progress in x-ray lithography
- Jerome P. Silverman
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper