Interhalogen plasma chemistries for dry etch patterning of Ni, Fe, NiFe and NiFeCo thin films
- H. Cho
- K.B. Jung
- et al.
- 1999
- Applied Surface Science
Paper
Publications
3553 results for Materials Discovery
Comparison of Cl2 and F2 based chemistries for the inductively coupled plasma etching of NiMnSb thin films
- J. Hong
- J.A. Caballero
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperLayered TaSiN as an oxidation resistant electrically conductive barrier
- A. Grill
- C.V. Jahnes
- et al.
- 1999
- Journal of Materials Research
PaperSurface potential studies of self-assembling monolayers using Kelvin probe force microscopy
- J. Lü
- L. Eng
- et al.
- 1999
- Surface and Interface Analysis
PaperImpact of polymer structure and confinement on the kinetics of Zdol 4000 bonding to amorphous-hydrogenated carbon
- R.J. Waltman
- George W. Tyndall
- et al.
- 1999
- Tribology Letters
PaperContact-Inking Stamps for Microcontact Printing of Alkanethiols on Gold
- Laurent Libioulle
- Alexander Bietsch
- et al.
- 1998
- Langmuir
PaperStability and molecular conformation of poly(benzyl ether) monodendrons with oligo(ethylene glycol) tails at the air-water interface
- J. Patrick Kampf
- Curtis W. Frank
- et al.
- 1998
- Langmuir
PaperConcerning the interactions between Zdol perfluoropolyether lubricant and an amorphous-nitrogenated carbon surface
- George W. Tyndall
- R.J. Waltman
- et al.
- 1998
- Langmuir
PaperDevelopments in equipment support technology
- J.J. Sullivan
- R. Gwizdak
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperEffects of argon addition to a platinum dry etch process
- K.R. Milkove
- J. Coffin
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper