Comparison of Cl2 and F2 based chemistries for the inductively coupled plasma etching of NiMnSb thin films
- J. Hong
- J.A. Caballero
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
3549 results for Materials Discovery
Contact-Inking Stamps for Microcontact Printing of Alkanethiols on Gold
- Laurent Libioulle
- Alexander Bietsch
- et al.
- 1998
- Langmuir
Stability and molecular conformation of poly(benzyl ether) monodendrons with oligo(ethylene glycol) tails at the air-water interface
- J. Patrick Kampf
- Curtis W. Frank
- et al.
- 1998
- Langmuir
Concerning the interactions between Zdol perfluoropolyether lubricant and an amorphous-nitrogenated carbon surface
- George W. Tyndall
- R.J. Waltman
- et al.
- 1998
- Langmuir
Developments in equipment support technology
- J.J. Sullivan
- R. Gwizdak
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effects of argon addition to a platinum dry etch process
- K.R. Milkove
- J. Coffin
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Localized degradation studies of ultrathin gate oxides
- H.J. Wen
- R. Ludeke
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Applicability of Sneddon relationships to the real case of a rigid cone penetrating an infinite half space
- J.C. Hay
- A. Bolshakov
- et al.
- 1998
- MRS Spring Meeting 1998
Experimental investigations of the Sneddon solution and an improved solution for the analysis of nanoindentation data
- J.C. Hay
- G.M. Pharr
- 1998
- MRS Spring Meeting 1998
Is selective CVD an improvement for the titanium silicide process in sub-quarter micron technology? A phase formation study using x-ray diffraction
- R.A. Roy
- Cryil Cabral Jr.
- et al.
- 1998
- MRS Spring Meeting 1998