Characterization of a next generation step-and-scan system
- Timothy J. Wiltshire
- Joseph P. Kirk
- et al.
- 1998
- SPIE Advanced Lithography 1998
Conference paper
Publications
25372 results for Science
Extension of 248 nm optical lithography: A thin film imaging approach
- Qinghuang Lin
- Ahmad D. Katnani
- et al.
- 1998
- Microlithography 1998
Conference paperApplicability of Sneddon relationships to the real case of a rigid cone penetrating an infinite half space
- J.C. Hay
- A. Bolshakov
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- 1998
- MRS Spring Meeting 1998
Conference paperThermal instability of the Cu-Ni interface above 200°C
- T.H. Westmore
- J.E.E. Baglin
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperFunctional high-speed characterization and modeling of a six-layer copper wiring structure and performance comparison with aluminum on-chip interconnections
- A. Deutsch
- H. Harrer
- et al.
- 1998
- IEDM 1998
Conference paperWithin-chip variability analysis
- S. Nassif
- 1998
- IEDM 1998
Conference paperTask-specific visualization design: A case study in operational weather forecasting
- L.A. Treinish
- 1998
- VIS 1998
Conference paperOn locally invertible 2-D polynomial convolutional encoders
- A. Dholakia
- H. Koorapaty
- 1998
- ISIT 1998
Conference paperDescreening printer-ready images
- A. Ravishankar Rao
- Frederick Mintzer
- et al.
- 1998
- NIP 1998
Conference paperInformation fusion by combining multiple features and classifiers
- J. Mao
- 1998
- ISMIP 1998
Conference paper