Laser stimulated photocathode electron beam prober for 15ps resolution waveform measurements
- Albert J. Fixl
- Keith A. Jenkins
- 1994
- Microelectronic Engineering
Paper
Publications
221 results at Microelectronic Engineering
Fabrication of high performance 512Kb SRAMs in 0.25 μm CMOS technology using x-ray lithography
- R. Viswanathan
- David Seeger
- et al.
- 1994
- Microelectronic Engineering
PaperImproved underlayers for acid amplified resists
- H.S. Sachdev
- R.W. Kwong
- et al.
- 1994
- Microelectronic Engineering
PaperHot-electron dynamics in SiO2 and the degradation of the Si/SiO2-interface
- E. Cartier
- D.J. DiMaria
- 1993
- Microelectronic Engineering
PaperReactive ion etching of InAlAs with Ar/Cl2 mixtures for ridge waveguide lasers
- R. Germann
- S. Hausser
- et al.
- 1993
- Microelectronic Engineering
Paper"Laser cleaning" removes particles from surfaces
- W. Zapka
- Winfrid Ziemlich
- et al.
- 1993
- Microelectronic Engineering
PaperMeasurement of the effective wavelength of x-ray lithography sources
- Juan R. Maldonado
- Inna Babich
- et al.
- 1993
- Microelectronic Engineering
PaperArrayed miniature electron beam columns
- T.H.P. Chang
- L.P. Muray
- et al.
- 1993
- Microelectronic Engineering
PaperPhotolithography overview for 64 megabit production
- T. Leslie
- W. Arden
- et al.
- 1993
- Microelectronic Engineering
PaperMicroscopic mechanisms of interface state generation by electrical stress
- 1993
- Microelectronic Engineering
Paper