A method to improve setup and overlay performance on an excimer laser stepper using a unique DUV resist-KRS
- Karen Petrillo
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- 1997
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Conference paper
Publications
24907 results for Exploratory Science
Scalable instruction-level parallelism through tree-instructions
- J.H. Moreno
- Mayan Moudgill
- 1997
- ICS 1997
Conference paperConducting polyaniline coatings for submicron lithography and SEM metrology
- Teresita Graham
- Marie Angelopoulos
- et al.
- 1997
- Microlithography 1997
Conference paperSimulation of X-ray mask defect printability
- B.S. Bollepalli
- Scott D. Hector
- et al.
- 1997
- Microlithography 1997
Conference paperStability of molded polydime thylsiloxane microstructures
- Emmanuel Delamarche
- Heinz Schmid
- et al.
- 1997
- Advanced Materials
PaperA self-generating modular neural network architecture for supervised learning
- Ke Chen
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- 1997
- Neurocomputing
PaperMolecular beam epitaxy and microstructural study of LSC thin films
- K. Verbist
- O. Milat
- et al.
- 1997
- Physical Review B - CMMP
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- M.T. Cuberes
- R.R. Schlittler
- et al.
- 1997
- Surface Science
PaperInvestigation of existing defects and defect generation in device-grade SiO2 by ballistic electron emission spectroscopy
- H.J. Wen
- R. Ludeke
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperSpontaneous flux and magnetic-interference patterns in 0 Josephson junctions
- J.R. Kirtley
- K.A. Moler
- 1997
- Physical Review B - CMMP
Paper