Deterministically isolated gratings through the directed self-assembly of block copolymers
- Gregory Sadasdf Doerk
- Joy Y. Cheng
- et al.
- 2013
- SPIE Advanced Lithography 2013
Publications
14446 results for Physical Sciences
Monitoring the evolution of Line Edge Roughness during resist development using an analog of quenched flow kinetics
- M.I. Sanchez
- L.K. Sundberg
- et al.
- 2013
- SPIE Advanced Lithography 2013
Directed self-assembly process implementation in a 300mm pilot line environment
- Chi-Chun Liu
- I. Cristina Estrada-Raygoza
- et al.
- 2013
- SPIE Advanced Lithography 2013
Computational aspects of optical lithography extension by Directed Self-Assembly
- Kafai Lai
- Chi-Chun Liu
- et al.
- 2013
- SPIE Advanced Lithography 2013
On the accuracy of different Fourier transforms of VLSI designs
- Rajai Nasser
- Paul Hurley
- 2013
- SPIE Advanced Lithography 2013
Enabling reverse tone imaging for via levels using attenuated Phase Shift Mask and source optimization
- Bassem Hamieh
- Hyun Chol Choi
- et al.
- 2013
- SPIE Advanced Lithography 2013
Depth-controllable ultra shallow indium gallium zinc oxide/gallium arsenide hetero junction diode
- Seong-Uk Yang
- Seung-Ha Choi
- et al.
- 2013
- Journal of Alloys and Compounds
Assisted cubic to hexagonal phase transition in GeSbTe thin films on silicon nitride
- Kadir Cil
- Yu Zhu
- et al.
- 2013
- Thin Solid Films
Dependence of Cu electromigration resistance on selectively deposited CVD Co cap thickness
- C.-C. Yang
- F. Baumann
- et al.
- 2013
- Microelectronic Engineering
Engineering future light emitting diodes and photovoltaics with inexpensive materials: Integrating ZnO and Si into GaN-based devices
- Can Bayram
- K.-T. Shiu
- et al.
- 2013
- SPIE OPTO 2013