Investigation of plasma etch damage to porous oxycarbosilane ultra low-k dielectric
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- Sebastian Engelmann
- et al.
- 2013
- Journal of Physics D: Applied Physics
Paper
Publications
14458 results for Physical Sciences
Formation of disk- and stacked-disk-like self-assembled morphologies from cholesterol-functionalized amphiphilic polycarbonate diblock copolymers
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- Ashlynn L. Lee
- et al.
- 2013
- Macromolecules
PaperBuckling characterization of gate all around silicon nanowires
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- Ishai Schwarzband
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperDiffraction pattern based optimization of lithographic targets for improved printability
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- Kanak B. Agarwal
- 2013
- DfM-DPI 2013
Conference paperCD optimization methodology for extending optical lithography
- C. Wong
- G. Seevaratnam
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperAdvanced plasma etch for the 10nm node and beyond
- 2013
- SPIE Advanced Lithography 2013
Conference paperEtch correction and OPC, a look at the current state and future of etch correction
- Ian Stobert
- Derren Dunn
- 2013
- SPIE Advanced Lithography 2013
Conference paperPattern transfer of directed self-assembly (DSA) patterns for CMOS device applications
- Hsin-Yu Tsai
- Hiroyuki Miyazoe
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperEnhanced desalination performance of polyamide bi-layer membranes prepared by sequential interfacial polymerization
- Young-Hye La
- Jacquana Diep
- et al.
- 2013
- Journal of Membrane Science
PaperOn the accuracy of different Fourier transforms of VLSI designs
- Rajai Nasser
- Paul Hurley
- 2013
- SPIE Advanced Lithography 2013
Conference paper