Diffraction pattern based optimization of lithographic targets for improved printability
- Shayak Banerjee
- Kanak B. Agarwal
- 2013
- DfM-DPI 2013
Conference paper
Publications
14465 results for Physical Sciences
CD optimization methodology for extending optical lithography
- C. Wong
- G. Seevaratnam
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperAdvanced plasma etch for the 10nm node and beyond
- 2013
- SPIE Advanced Lithography 2013
Conference paperPattern transfer of directed self-assembly (DSA) patterns for CMOS device applications
- Hsin-Yu Tsai
- Hiroyuki Miyazoe
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperEtch correction and OPC, a look at the current state and future of etch correction
- Ian Stobert
- Derren Dunn
- 2013
- SPIE Advanced Lithography 2013
Conference paperEnhanced desalination performance of polyamide bi-layer membranes prepared by sequential interfacial polymerization
- Young-Hye La
- Jacquana Diep
- et al.
- 2013
- Journal of Membrane Science
PaperEnabling reverse tone imaging for via levels using attenuated Phase Shift Mask and source optimization
- Bassem Hamieh
- Hyun Chol Choi
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperDevelopment of KrF hybrid resist for a dual isolation application
- Sen Liu
- Steven Holmes
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperDeterministically isolated gratings through the directed self-assembly of block copolymers
- Gregory Sadasdf Doerk
- Joy Y. Cheng
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperComputational aspects of optical lithography extension by Directed Self-Assembly
- Kafai Lai
- Chi-Chun Liu
- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paper