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Conference paper
Publications
14465 results for Physical Sciences
Deterministically isolated gratings through the directed self-assembly of block copolymers
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- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperComputational aspects of optical lithography extension by Directed Self-Assembly
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- et al.
- 2013
- SPIE Advanced Lithography 2013
Conference paperBenchmarking study of 3D mask modeling for 2 and 1x nodes
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- 2013
- SPIE Advanced Lithography 2013
Conference paperMonitoring the evolution of Line Edge Roughness during resist development using an analog of quenched flow kinetics
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- 2013
- SPIE Advanced Lithography 2013
Conference paperDepth-controllable ultra shallow indium gallium zinc oxide/gallium arsenide hetero junction diode
- Seong-Uk Yang
- Seung-Ha Choi
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- 2013
- Journal of Alloys and Compounds
PaperDependence of Cu electromigration resistance on selectively deposited CVD Co cap thickness
- C.-C. Yang
- F. Baumann
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- Microelectronic Engineering
PaperAssisted cubic to hexagonal phase transition in GeSbTe thin films on silicon nitride
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- Thin Solid Films
PaperEngineering future light emitting diodes and photovoltaics with inexpensive materials: Integrating ZnO and Si into GaN-based devices
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- K.-T. Shiu
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- 2013
- SPIE OPTO 2013
Conference paperFlexible, stable, and easily processable optical silicones for low loss polymer waveguides
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- Chad M. Amb
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- 2013
- SPIE OPTO 2013
Conference paper