Development of APSM resists for sub-200 nm contact holes
- M. Rajaratnam
- M. Reilly
- et al.
- 1999
- Microelectronic Engineering
Paper
Publications
26914 results for Science
Combining fuzzy information from multiple systems
- 1999
- Journal of Computer and System Sciences
PaperOxidation chemistry of a pentaerythritol tetraester oil
- Tom Karis
- J.L. Miller
- et al.
- 1999
- Tribology Transactions
PaperSurface modification of liquid crystal alignment layer by photochemical reaction
- Fumiaki Yamada
- Akiko Nishikai
- et al.
- 1999
- Molecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals
PaperMagnetic imaging of the paramagnetic Meissner effect in the granular high-Tc superconductor Bi2Sr2CaCu2Ox
- J.R. Kirtley
- A.C. Mota
- et al.
- 1999
- Journal of Physics Condensed Matter
PaperLow density of states at the epitaxial CaF2-Si(111) interface
- M. Dähne-Prietsch
- I. Manke
- et al.
- 1999
- Journal of Physics D: Applied Physics
PaperStress-Corrosion Cracking of Low-Dielectric-Constant Spin-On-Glass Thin Films
- Robert F. Cook
- Eric G. Liniger
- 1999
- JES
PaperTitanium carbide etching in high density plasma
- R. Hsiao
- D.C. Miller
- et al.
- 1999
- Applied Surface Science
Paper2 + p-SAT: Relation of typical-case complexity to the nature of the phase transition
- Rémi Monasson
- Riccardo Zecchina
- et al.
- 1999
- Random Structures and Algorithms
PaperHigh resolution x-ray photoelectron spectroscopy and INDO/S-CI study of the core electron shakeup states of pyromellitic dianhydride-4,4′-oxydianiline polyimide
- Y. Nakayama
- P. Persson
- et al.
- 1999
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper