Role of gas phase reactions in subatmospheric chemical-vapor deposition ozone/TEOS processes for oxide deposition
- I.A. Shareef
- G.W. Rubloff
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
24879 results for Exploratory Science
Study of sub-bandgap photo-induced absorption in a-Si:H using excitation spectroscopy in a waveguide configuration
- M. Zelikson
- K. Weiser
- et al.
- 1996
- Journal of Non-Crystalline Solids
PaperHorizontally redundant, split-gate a-Si:H thin film transistors
- Yue Kuo
- 1996
- JES
PaperElectron-beam microcolumn fabrication and testing
- M. Despont
- U. Staufer
- et al.
- 1996
- Microelectronic Engineering
PaperImplementing OSI agent/managers for TMN
- M. Feridun
- L. Heusler
- et al.
- 1996
- IEEE Communications Magazine
PaperIntegral equation methods for stokes flow and isotropic elasticity in the plane
- Leslie Greengard
- Mary Catherine Kropinski
- et al.
- 1996
- Journal of Computational Physics
PaperFluorocarbon high density plasmas. VII. Investigation of selective SiO2-to-Si3N4 high density plasma etch processes
- Ying Zhang
- Gottlieb S. Oehrlein
- et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperAsymptotic conditional probabilities: The unary case
- Adam J. Grove
- Joseph Y. Halpern
- et al.
- 1996
- SIAM Journal on Computing
PaperA BDD SAT solver for satisfiability testing: An industrial case study
- Ruchir Puri
- Jun Gu
- 1996
- Ann. Math. Artif. Intell.
PaperCorrelation of UVIIHS resist chemistry to dissolution rate measurements
- J. Thackeray
- T.H. Fedynyshyn
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper