Development of APSM resists for sub-200 nm contact holes
- M. Rajaratnam
- M. Reilly
- et al.
- 1999
- Microelectronic Engineering
Paper
Publications
26932 results for Science
Scaling the gate dielectric: materials, integration, and reliability
- D.A. Buchanan
- 1999
- IBM J. Res. Dev
PaperSU-8: A low-cost negative resist for MEMS
- H. Lorenz
- M. Despont
- et al.
- 1999
- JMM
PaperFast universal coding with context models
- Jorma Rissanen
- 1999
- IEEE Trans. Inf. Theory
PaperComplexity of tree automata and logics of programs
- E. Allen Emerson
- Charanjit S. Jutla
- 1999
- SIAM Journal on Computing
PaperOxidation chemistry of a pentaerythritol tetraester oil
- Tom Karis
- J.L. Miller
- et al.
- 1999
- Tribology Transactions
PaperDetermination of rotational polarization using 1 + 1′ REMPI: A case study of D2 associative desorption from Cu(111)
- H. Hou
- S.J. Gulding
- et al.
- 1999
- Journal of Electron Spectroscopy and Related Phenomena
PaperTurning points in interaction with computers
- Frances E. Allen
- 1999
- IBM Systems Journal
PaperInvestigation of deep UV resists by NMR: Residual casting solvents, chemistries, and PAG decomposition in film
- Hiroshi Ito
- Mark Sherwood
- 1999
- J. Photopolym. Sci. Tech.
PaperAttractive interatomic force as a tunnelling phenomenon
- C.J. Chen
- 1999
- Journal of Physics Condensed Matter
Paper