Cu metallization using a permanent magnet electron cyclotron resonance microwave plasma/sputtering hybrid system
- S.M. Gorbatkin
- D.B. Poker
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
24906 results for Exploratory Science
Chemically induced phase separation: A new technique for the synthesis of macroporous epoxy networks
- J. Kiefer
- J.G. Hilborn
- et al.
- 1996
- Polymer
PaperAn inquiry concerning the principles of Si 2p core-level photoemission shift assignments at the Si/SiO2 interface
- F.R. McFeely
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperSchiff base precursor compounds for the chemical beam epitaxy of oxide thin films. I. Deposition of CuO on MgO[001] using copper (II) bis(benzoylacetone)-ethylendiimine
- E. Fritsch
- E. Mächler
- et al.
- 1996
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperLiner conformality in ionized magnetron sputter metal deposition processes
- S. Hamaguchi
- S.M. Rossnagel
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
PaperA high order explicit method for the computation of flow about a circular cylinder
- Christopher R. Anderson
- Marc B. Reider
- 1996
- Journal of Computational Physics
PaperComputational holographic bandwidth compression
- M. Lucente
- 1996
- IBM Systems Journal
PaperHalf-integer flux quantum effect in cuprate superconductors a probe of pairing symmetry
- C.C. Tsuei
- J.R. Kirtley
- et al.
- 1996
- Physica Scripta T
PaperAnalysis of relaxation processes in electro-optic polymers
- D.M. Burland
- K.U. Leuven
- 1996
- Molecular Crystals and Liquid Crystals Science and Technology Section B: Nonlinear Optics
PaperAn all-fibre-optic Fourier transform spectrometer
- Martin Stelzle
- Jürgen Tuchtenhagen
- et al.
- 1996
- Measurement Science and Technology
Paper