26932 results for
Science- 1998
- IEEE Transactions on Knowledge and Data Engineering
Paper
- J.J. Sullivan
- R. Gwizdak
- et al.
- 1998
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Paper
- B.D. Terris
- S. Rishton
- et al.
- 1998
- Applied Physics A: Materials Science and Processing
Paper
- 1998
- Communications of the ACM
Review
Review
- Paul Glasserman
- Philip Heidelberger
- et al.
- 1998
- IEEE TACON
Review
- Qinghuang Lin
- Ahmad D. Katnani
- et al.
- 1998
- Microlithography 1998
Conference paper
- Christopher J. Progler
- Donald C. Wheeler
- 1998
- SPIE Advanced Lithography 1998
Conference paper
- Alessandro Callegari
- Katherina Babich
- et al.
- 1998
- SPIE Advanced Lithography 1998
Conference paper