Image placement errors in x-ray masks induced by changes in resist stress during electron-beam writing
- R.E. Acosta
- Denise Puisto
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Publications
24906 results for Exploratory Science
Etching of tantalum in fluorine-containing high density plasmas
- R. Hsiao
- D.C. Miller
- 1996
- JES
PaperTolane oligomers: Model thermotropic liquid crystals
- Robert J. Twieg
- Vano Chu
- et al.
- 1996
- Liquid Crystals
PaperPolyimides derived from nonaromatic monomers: Synthesis, characterization and potential applications
- W. Volksen
- H.J. Cha
- et al.
- 1996
- Reactive and Functional Polymers
PaperRobust characterizations of polynomials with applications to program testing
- Ronitt Rubinfeld
- Madhu Sudan
- 1996
- SIAM Journal on Computing
PaperBiCMOS process integration and device optimization: Basic concepts and new trends
- J.N. Burghartz
- 1996
- Electrical Engineering
PaperInstrumental developments and recent experiments in near-field optical microscopy
- H. Heinzelmann
- Th. Lacoste
- et al.
- 1996
- Thin Solid Films
PaperFermi surface and extended van Hove singularity in the non-cuprate layered perovskite superconductor Sr2RuO4
- D.H. Lu
- M. Schmidt
- et al.
- 1996
- Journal of Low Temperature Physics
PaperComplexity of Bezout's theorem IV: Probability of success; extensions
- Michael Shub
- Steve Smale
- 1996
- SIAM Journal on Numerical Analysis
PaperScattering properties of multicomponent polymer solutions: Polyelectrolytes, homopolymer mixtures and diblock copolymer
- Redouane Borsali
- 1996
- Macromolecular Chemistry and Physics
Review