Is selective CVD an improvement for the titanium silicide process in sub-quarter micron technology? A phase formation study using x-ray diffraction
- R.A. Roy
- Cryil Cabral Jr.
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paper
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26914 results for Science
Optical lens specifications from the user's perspective
- Christopher J. Progler
- Donald C. Wheeler
- 1998
- SPIE Advanced Lithography 1998
Conference paperPerformance test case generation for microprocessors
- Pradip Bose
- 1998
- VTS 1998
Conference paperSequential processing for content-based retrieval of composite objects
- Chung-Sheng Li
- John R. Smith
- et al.
- 1998
- IS&T/SPIE Electronic Imaging 1998
Conference paperReactive ion etching of 193-nm resist candidates: Current platforms and future requirements
- Thomas I. Wallow
- Phillip J. Brock
- et al.
- 1998
- Microlithography 1998
Conference paperExperience using the IBM supply chain simulator
- S. Bagchi
- S. Buckley
- et al.
- 1998
- WSC 1998
Conference paperAnatomy-based registration of CT-scan and x-ray fluoroscopy data for intraoperative guidance of a surgical robot
- Andre P. Guéziec
- Peter Kazanzides
- et al.
- 1998
- SPIE Medical Imaging 1998
Conference paperDesigning a testable System on a Chip
- S.V. Kosonocky
- A.A. Bright
- et al.
- 1998
- VTS 1998
Conference paper"Copper chip" technology
- D. Edelstein
- 1998
- Microelectronic Manufacturing 1998
Conference paperWithin-chip variability analysis
- S. Nassif
- 1998
- IEDM 1998
Conference paper