Low-cost PDMS seal ring for single-side wet etching of MEMS structures
- J. Brugger
- G. Beljakovic
- et al.
- 1998
- Sensors and Actuators, A: Physical
Paper
Publications
26932 results for Science
Hall magnetometry measurements of bulk single crystalline rings
- M. Charalambous
- R.H. Koch
- et al.
- 1998
- Physical Review B - CMMP
PaperElastic and mechanical properties of ion-implanted silicon determined by surface-acoustic-wave spectrometry
- M. Szabadi
- P. Hess
- et al.
- 1998
- Physical Review B - CMMP
PaperFabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
- Laurent Dellmann
- Sylvian Roth
- et al.
- 1998
- Sensors and Actuators, A: Physical
PaperCall admission control for adaptive multimedia in wireless/mobile networks
- Taekyoung Kvron
- Yanghee Choi
- et al.
- 1998
- WOWMOM 1998
Conference paperImidization and interdiffusion of poly(amic ethyl ester) precursors of PMDA/3,4′-ODA
- Nancy C. Stoffel
- Edward J. Kramer
- et al.
- 1998
- Journal of Polymer Science, Part B: Polymer Physics
PaperRapid Parallel Evaluation of Integrals in Potential Theory on General Three-Dimensional Regions
- A. Greenbaum
- A. Mayo
- 1998
- Journal of Computational Physics
PaperImplementation and performance of a femtosecond laser mask repair system in manufacturing
- R. Haight
- Dennis Hayden
- et al.
- 1998
- BACUS Symposium on Photomask Technology and Management 1998
Conference paperA versatile and efficient synthesis of alkoxyamine LFR initiators via manganese based asymmetric epoxidation catalysts
- Julian Dao
- Didier Benoit
- et al.
- 1998
- J Polym Sci Part A
PaperElectronic structure of benzene on Ni(100) and Cu(110): An x-ray-spectroscopy study
- M. Weinelt
- N. Wassdahl
- et al.
- 1998
- Physical Review B - CMMP
Paper