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- 2003
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Paper
Publications
3613 results for Mathematical Sciences
A secure conference scheme for mobile communications
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PaperCycle Tanner-graph codes over GF(2b)
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Conference paperPolymer dynamics and diffusive properties in ultra-thin photoresist films
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- 2003
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Conference paperDoes line edge roughness matter?: FEOL and BEOL perspectives
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- 2003
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- 2003
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- 2003
- Microlithography 2003
Conference paperCharacterization of photoresist spatial resolution by interferometric lithography
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- William D. Hinsberg
- et al.
- 2003
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Conference paperDeprotection volume characteristics and line edge morphology in chemically amplified resists
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- Tengjiao Hu
- et al.
- 2003
- Microlithography 2003
Conference paperFailure prediction across process window for robust OPC
- Shumay D. Shang
- Yuri Granik
- et al.
- 2003
- SPIE Advanced Lithography 2003
Conference paper