X-ray absorption spectroscopy to probe interfacial issues in photolithography
- Joseph L. Lenhart
- Daniel A. Fischer
- et al.
- 2003
- Microlithography 2003
Publications
3599 results for Mathematical Sciences
Using the critical ionization model for resist development to estimate contrast curves and roughening
- Frances A. Houle
- William D. Hinsberg
- et al.
- 2003
- Microlithography 2003
Selective enhancement of contrast blocks for MPEG/JPEG image compression
- Konstantin Y. Kupeev
- Zohar Sivan
- 2003
- VCIP 2003
Polyelectrolyte effects in model photoresist developer solutions: Roles of base concentration and added salts
- Vivek M. Prabhu
- Ronald L. Jones
- et al.
- 2003
- Microlithography 2003
The estimated impact of shot noise in extreme ultraviolet lithography
- Jonathan Cobb
- Frances Houle
- et al.
- 2003
- Microlithography 2003
Rational design in cyclic olefin resists for sub-100nm lithography
- Wenjie Li
- P. Rao Varanasi
- et al.
- 2003
- Microlithography 2003
Extendibility of chemically amplified amplified resists: Another brick wall?
- William Hinsberg
- Frances Houle
- et al.
- 2003
- Microlithography 2003
Reinforcement learning with immediate rewards and linear hypotheses
- Naoki Abe
- Alan W. Biermann
- et al.
- 2003
- Algorithmica (New York)
"Feeling" the noise in nanoscale systems: Studies based on ultrasensitive force detection
- D. Rugar
- R. Budakian
- et al.
- 2003
- SPIE International Symposium on Fluctuations and Noise 2003
"Feeling" the noise in nanoscale systems: Studies based on ultrasensitive force detection
- D. Rugar
- R. Budakian
- et al.
- 2003
- SPIE International Symposium on Fluctuations and Noise 2003