Advanced plasma etch technologies for nanopatterning
- Rich Wise
- 2013
- J. Micro/Nanolithogr. MEMS MOEMS
Paper
Publications
14465 results for Physical Sciences
Nondestructive defect characterization of saw-damage-etched multicrystalline silicon wafers using scanning electron acoustic microscopy
- Lei Meng
- Satyavolu S. Papa Rao
- et al.
- 2013
- IEEE Journal of Photovoltaics
PaperHeterointegration by molecular beam epitaxy: (In, Ga)As/GaAs quantum wells on GaAs, Ge, Ge/Si and Ge/Si pillars
- M. Richter
- Emanuele Uccelli
- et al.
- 2013
- Journal of Crystal Growth
PaperMethods for joint optimization of mask and design targets for improving lithographic process window
- Shayak Banerjee
- Kanak B. Agarwal
- et al.
- 2013
- J. Micro/Nanolithogr. MEMS MOEMS
PaperEpitaxial growth of LaAlO3 on SrTiO3-buffered Si (001) substrates by atomic layer deposition
- Thong Q. Ngo
- Agham Posadas
- et al.
- 2013
- Journal of Crystal Growth
PaperShape slack: A design-manufacturing co-optimization methodology using tolerance information
- Shayak Banerjee
- Kanak B. Agarwal
- et al.
- 2013
- J. Micro/Nanolithogr. MEMS MOEMS
PaperSmall NMR biomolecular sensors
- Nan Sun
- Yong Liu
- et al.
- 2013
- Solid-State Electronics
PaperAsymmetric magnetic disorder observed in thermally activated magnetization reversal of exchange-biased IrMn/CoFe films
- Hun-Sung Lee
- Kwang-Su Ryu
- et al.
- 2013
- J Magn Magn Mater
PaperCharacterization of wafer geometry and overlay error on silicon wafers with nonuniform stress
- Timothy A. Brunner
- Vinayan C. Menon
- et al.
- 2013
- Journal of Micro/Nanolithography, MEMS, and MOEMS
PaperStencil-nanopatterned back reflectors for thin-film amorphous silicon n-i-p solar cells
- Celine Pahud
- Veronica Savu
- et al.
- 2013
- IEEE Journal of Photovoltaics
Paper