Characterization of spin -on glasses by microindentation
- E. Simonyi
- K.-W. Lee
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paper
Publications
26914 results for Science
Copper ULSI interconnect technology
- D. Edelstein
- 1998
- MRS Spring 1998
Conference paperDynamic coercivity and thermal decay of magnetic media
- K.A. Rubin
- Jason Goldberg
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperTemplating nanopores into poly(methylsilsesquioxane): new low-dielectric coatings suitable for microelectronic applications
- J. Remenar
- C.J. Hawker
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperCorrosion protection of Cu, Fe, Mn and Co surfaces
- J.E.E. Baglin
- A.J. Kellock
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperHigh conductivity gate metallurgy for TFT/LCD's
- P.M. Fryer
- E.G. Colgan
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperProperties development during curing of low dielectric-constant spin-on glasses
- R.F. Cook
- E. Liniger
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperReliability and copper interconnections with low dielectric constant materials
- C.-K. Hu
- 1998
- MRS Spring Meeting 1998
Conference paperElectrical test sites for AMLCD-TFT array process characterization
- E.G. Colgan
- R.J. Polastre
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paperExperimental and theoretical study of structure-dielectric property relationships for polysilsesquioxanes
- Sung Mog Kim
- D.Y. Yoon
- et al.
- 1998
- MRS Spring Meeting 1998
Conference paper