Characterization of defects produced in TEOS thin films due to chemical-mechanical polishing (CMP)
- F.B. Kaufman
- S. Cohen
- et al.
- 1995
- MRS Spring Meeting 1995
Conference paper
Publications
24880 results for Exploratory Science
Surface-topography simulations of ionized sputter metal deposition
- S. Hamaguchi
- S.M. Rossnagel
- 1995
- MRS Spring Meeting 1995
Conference paperNanosecond structural transformation of magnetic thin films: PtMnSb, structure and magnetic properties
- Yukiko Kubota
- E.E. Marinero
- 1995
- MRS Spring Meeting 1995
Conference paperRunlength encoding of quantized DCT coefficients
- Viresh Ratnakar
- Ephraim Feig
- et al.
- 1995
- IS&T/SPIE Electronic Imaging 1995
Conference paperProbing the limits of silicon-based nanoelectronics
- S.J. Wind
- Y. Taur
- et al.
- 1995
- MRS Spring Meeting 1995
Conference paperThermal degradation of tantalum-nickel thin film couples
- M.H. Tabacniks
- A.J. Kellock
- et al.
- 1995
- MRS Spring Meeting 1995
Conference paperStability and performance issues for nonlinear optical chromophores, polymers and devices
- R.J. Twieg
- D.M. Burland
- et al.
- 1995
- MRS Spring Meeting 1995
Conference paperStudies of the relationship between megasonics, surface etching, and particle removal in SC-1 solutions
- S.L. Cohen
- D.L. Rath
- et al.
- 1995
- MRS Spring Meeting 1995
Conference paperThermal and mechanical properties of polyimide films
- S.T. Chen
- 1995
- MRS Spring Meeting 1995
Conference paperDirect probing of the adsorbate-substrate chemical bond using angle-dependent x-ray-emission spectroscopy
- A. Nilsson
- P. Bennich
- et al.
- 1995
- Physical Review B
Paper