Interconnect material choices for future scaled devices
- Gregory Fritz
- Adam Pyzyna
- et al.
- 2012
- ADMETA 2012
Conference paper
Publications
14465 results for Physical Sciences
High mobility high-κ-all-around asymmetrically-strained Germanium nanowire trigate p-MOSFETs
- Winston Chern
- Pouya Hashemi
- et al.
- 2012
- IEDM 2012
Conference paperThe effects of plasma exposure on low-k dielectric materials
- J.L. Shohet
- H. Ren
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperPatterning of CMOS device structures for 40-80nm pitches and beyond
- Sebastian U. Engelmann
- R.M. Martin
- et al.
- 2012
- SPIE Advanced Lithography 2012
Conference paperHot water cooled electronics for high exergetic utility
- Severin Zimmermann
- Manish K. Tiwari
- et al.
- 2012
- ASME HT 2012
Conference paperAn integration path for gate-first UTB III-V-on-insulator MOSFETs with silicon, using direct wafer bonding and donor wafer recycling
- Lukas Czornomaz
- N. Daix
- et al.
- 2012
- IEDM 2012
Conference paperCu CMP and its challenge for 20nm nodes and beyond
- John H. Zhang
- Wei-Tsu Tseng
- et al.
- 2012
- MRS Spring Meeting 2012
Conference paperAn architecture for distributed video applications based on declarative networking
- Xiping Wang
- Cesar Gonzales
- et al.
- 2012
- SPIE Defense + Security 2012
Conference paperMechanisms of lifetime degradation in Si/ARC samples patterned by laser lift-off
- Katherine Saenger
- 2012
- LMPSE 2012
Conference paper22nm High-performance SOI technology featuring dual-embedded stressors, Epi-Plate High-K deep-trench embedded DRAM and self-aligned Via 15LM BEOL
- S. Narasimha
- P. Chang
- et al.
- 2012
- IEDM 2012
Conference paper